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3 Current products of MKS Instruments


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Industrial multi-gas/range mass flow controller with IP66 Rating for gas flow rates up to 1000 slm

Gas flow rates up to 1000 slm | IP66 qualified | Multi-range/multi-gas capability | 1% of setpoint accuracy

Mass Flow Controller designed for industrial mass flow control applications in harsh environments where water and dust may be present and must be protected against...


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Real time, all optical on-line hydrocarbon composition analyzer

Natural gas, alternative fuel analysis. BTU & Wobbe measurement, alternative to Gas Chromatography

No carrier or calibration gas; fast-response analytics for accuracy, repeatability, linearity and stability. Lower cost, higher efficiency in power-gen applications...


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The Ultimate in Trace Detection of Gases at Atmospheric Pressure by Quadrupole Mass Spectrometry

Innovation for fast reliable monitoring to low ppb levels in research and industrial applications

A unique platform with novel technologies to ensure lowest detection limits and superior data for qualitative and quantitative applications...


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