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Deposition of metallic silver coatings by Aerosol Assisted MOCVD using two new silver [small beta]-diketonate adduct metalorganic precursors

This work reports two new silver metalorganic precursors for the chemical vapor deposition of Ag metallic coatings. Both precursors are based on β-diketonate adducts, namely, Ag(hfac)(L) (H-hfac = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione), where L is 1,10-phenanthroline (phen) or 2,5,8,11-tetraoxadodecane (triglyme)

Authors:   H. Liu; S. Battiato; A. L. Pellegrino; P. Paoli; P. Rossi; C. Jiménez; G. Malandrino; D. Muñoz-Rojas
Journal:   Dalton Transactions
DOI:   10.1039/C7DT01647F
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  • chemical vapor deposition
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