MEMS thermal actuator

A MEMS thermal actuator is a micromechanical device that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped Single Crystal Silicon or Polysilicon as a complex compliant member, the increase in temperature can be achieved internally by electrical resistive heating or externally by a heat source capable of locally introducing heat.

Types of thermal actuators

• Asymmetric (bimorph)
• Symmetric (bent beam, chevron)

Other types of MEMS Actuators

• Electrostatic - parallel plate or comb drive
• Magnetic
• Piezoelectric