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5 Products of MKS Instruments


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Industrial Multi Gas/- Range Mass Flow Controller with IP66 Rating for Gas Flow Rates up to 1000 slm

Gas Flow Rates up to 1000 slm, IP66 Qualified, Multi-Range/Multi-Gas Capability, 1% of Setpoint Accuracy

Mass Flow Controller designed for industrial mass flow control applications in harsh environments where water and dust may be present....


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Capacitance Manometers

Direct, Gas Independent, High Accuracy Pressure Measurement

MKS Baratron® capacitance manometers are accurate and repeatable, insensitive to gas composition ✓ MKS Baratron® are highly resistant to corrosion when the materials are matched to the process ✓ MKS Baratron® sensor is heated to 45°, 80°, or 100°C for up to 0.10% of reading accuracy...


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SG1024 Solid State Microwave Generator Series with up to 1,5 kW per unit either with 915 MHz or 2,45 GHz

SG series is a new microwave technology from the inventor of the high efficiency switch mode technology

Worldwide MKS Instruments support and service structure for on site tech support and local service ✓ Microwave systems based on solid state technology with up to 22kW or Switch Mode technology up to 75kW...


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Fast and Reliable Monitoring of Low ppb Levels of Impurities in Industrial and Research Applications

Multi Component Online Gas Analyzer for Trace Gas Analysis

Innovative Tunable Filter Spectroscopy (TFS) technology enabling high selectivity and stability measurement of trace gases at ppb levels. Allows the analysis of trace hydrocarbon, moisture, CO, CO2 and N2O...


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The Ultimate in Trace Detection of Gases at Atmospheric Pressure by Quadrupole Mass Spectrometry

Innovation for Fast Reliable Monitoring to Low ppb Levels in Research and Industrial Applications

A unique platform with novel technologies to ensure lowest detection limits and superior data for qualitative and quantitative applications...


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