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Klassische Hartstoffschichten, wie z. B. Metallnitride, -oxide oder hartamorphe Kohlenstoffschichten werden gewöhnlich in Schichtdicken bis ca. 10 [mu]m angewendet.Die Herstellung solcher Schichten wird industriell sehr gut beherrscht, weshalb sie zum Verschleißschutz auf Werkzeugen und Komponenten eingesetzt werden.Die Herstellung dickerer Schichten (>10 [mu]m) mit PVd-Verfahren ist eine Herausforderung. Neben störenden Eigenspannungszuständen bilden sich bei dickeren Schichten oft inhomogene Schichtstrukturen aus, die durch Wachstumsdefekte oder eingelagerte Partikel hervorgerufen werden. Deren Bildung oder zumindest deren weiteres Wachstum muss beim Beschichtungsprozess verhindert werden. Dies kann beispielsweise durch einen geeigneten Lagenaufbau der Schichten oder durch eine optimierte Prozessführung erreicht werden. über eine nachträgliche Schleifbearbeitung dieser Schichten konnte nachgewiesen werden, dass sie für eine Strukturierung ausreichend homogen sind. Damit ergeben sich zahlreiche neue Einsatzmöglichkeiten.
| Authors: | Kaulfuß, Frank; Zimmer, Otmar | |
| Journal: | Vakuum in Forschung und Praxis | |
| Volume: | 22 | |
| edition: | 2 | |
| Year: | 2010 | |
| Pages: | 39 | |
| DOI: | 10.1002/vipr.201000412 | |
| Publication date: | 01-Apr-2010 |
The unfolding landscape of the congenital myasthenic syndromes
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How mercury contamination affects reptiles in the Amazon basin
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Bioengineers Succeed in Producing Plastic Without the use of Fossil Fuels
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