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2,450 Newest Publications of AIP Publishing Center


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Antimony-assisted carbonization of Si(111) with solid source molecular beam epitaxy

25-Sep-2013 | Justin Hackley, Wendy L. Sarney, and Christopher J. K. Richardson, Journal of Vacuum Science & Technology B, 2013

The carbonization of an antimony-terminated Si (111) surface in a solid source molecular beam epitaxy system is presented. Reflection high-energy electron diffraction, atomic force microscopy, x-ray photoelectron spectroscopy, and cross-sectional transmission electron microscopy are used to ...


Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges

25-Sep-2013 | Jia Liu, De-Qi Wen, Yong-Xin Liu, Fei Gao, Wen-Qi Lu et al., Journal of Vacuum Science & Technology B, 2013

The electron density is measured in low-pressure dual-frequency (2/60 MHz) capacitively coupled oxygen discharges by utilizing a floating hairpin probe. The dependence of electron density at the discharge center on the high frequency (HF) power, low frequency (LF) power, and gas pressure are ...


Inductively coupled plasma etching of through-cell vias in III–V multijunction solar cells using SiCl4/Ar

25-Sep-2013 | Yuning Zhao, Patrick Fay, Andree Wibowo, and Chris Youtsey, Journal of Vacuum Science & Technology B, 2013

In this work, inductively coupled plasma reactive ion etching processes with SiCl4/Ar gas chemistries were optimized to fabricate wafer-scale, high-density, small-area via-holes for InGaP/GaAs/InGaAs inverted metamorphic triple-junction solar cells. Anisotropic and smooth etching with good ...


Fabrication of hierarchical nanostructures using free-standing trilayer membrane

25-Sep-2013 | Ke Du, Yuyang Liu, Ishan Wathuthanthri, and Chang-Hwan Choi, Journal of Vacuum Science & Technology B, 2013

Hierarchical nanostructures are typically fabricated with multiple lithography steps on prepatterned micro- or nanostructures. However, such conventional multiple lithography steps result in poor coverage and uniformity, especially when patterning on high-aspect-ratio micro- or nanostructures. In ...


Application of EBL fabricated nanostructured substrates for surface enhanced Raman spectroscopy detection of protein A in aqueous solution

25-Sep-2013 | Luis Gutierrez-Rivera, Robert F. Peters, Steven K. Dew, and Maria Stepanova, Journal of Vacuum Science & Technology B, 2013

Surface enhanced Raman spectroscopy (SERS) allows detection of unique signatures of molecular vibrations, which identify molecules adsorbed on nanostructured substrates. However, for SERS detection techniques to be reproducible, highly regular metallic nanostructures must be fabricated. In this ...


Low-temperature plasmas in carbon nanostructure synthesis

20-Sep-2013 | Igor Levchenko, Michael Keidar, Shuyan Xu, Holger Kersten, and Kostya (Ken) Ostrikov, Journal of Vacuum Science & Technology B, 2013

Plasma-based techniques offer many unique possibilities for the synthesis of various nanostructures both on the surface and in the plasma bulk. In contrast to the conventional chemical vapor deposition and some other techniques, plasma-based processes ensure high level of controllability, good ...


Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns

20-Sep-2013 | Ling-Shu Wan, Paulina A. Rincon Delgadillo, Roel Gronheid, and Paul F. Nealey, Journal of Vacuum Science & Technology B, 2013

In this work ternary blends of symmetric lamellae-forming poly(styrene-block-methyl methacrylate) block copolymer and polystyrene and PMMA homopolymers were prepared for the directed self-assembly (DSA) on chemically nanopatterned substrates using 2× density multiplication. Homopolymers with ...


Three-dimensional hologram-read-only memory duplication by nanoimprint lithography

20-Sep-2013 | Noriyuki Unno, Shuhei Yoshida, Hideaki Akamatsu, Manabu Yamamoto, Shin-ichi Satake et al., Journal of Vacuum Science & Technology B, 2013

Because the amount of multimedia data is continually increasing, there is growing demand for high-speed, large-capacity, read-only memory (ROM) to facilitate data distribution. Computer-generated hologram-ROM (CGH-ROM) has received considerable attention in relation to its potential to meet this ...


Deuterium ion beam irradiation onto the pulsed laser deposited tungsten thin films

20-Sep-2013 | A. T. T. Mostako, Alika Khare, C. V. S. Rao, Sudhirsinh Vala, R. J. Makwana et al., Journal of Vacuum Science & Technology B, 2013

The effect of 10, 20, and 30 keV deuterium (D) ion beam irradiation onto the optical quality of mirrorlike tungsten (W) thin films deposited by pulsed laser deposition technique is reported. The dependence of D ion energy on the changes in reflectivity of W mirrors after irradiation are explained ...


Application of proton beam writing for the direct etching of polytetrafluoroethylene for polydimethylsiloxane replica molding

19-Sep-2013 | Hiroyuki Nishikawa and Takashi Hozumi, Journal of Vacuum Science & Technology B, 2013

A direct etching phenomenon of polytetrafluoroethylene (PTFE) is reported via 1.0 MeV proton beam writing. With a fluence level of more than 0.9 μC/mm2, direct etching of the PTFE is observed using a scanning electron microscope. The decrease of CF2 and CF3 bonds in the PTFE composition is also ...


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