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MEMS thermal actuator

A MEMS thermal actuator is a micromechanical device that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped Single Crystal Silicon or Polysilicon as a complex compliant member, the increase in temperature can be achieved internally by electrical resistive heating or externally by a heat source capable of locally introducing heat.

Types of thermal actuators

  • Asymmetric (bimorph)
  • Symmetric (bent beam, chevron)

Other types of MEMS Actuators

  • Electrostatic - parallel plate or comb drive
  • Magnetic
  • Piezoelectric
This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "MEMS_thermal_actuator". A list of authors is available in Wikipedia.
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