To use all functions of this page, please activate cookies in your browser.
My watch list
my.chemeurope.com
my.chemeurope.com
With an accout for my.chemeurope.com you can always see everything at a glance – and you can configure your own website and individual newsletter.
- My watch list
- My saved searches
- My saved topics
- My newsletter
MEMS thermal actuatorA MEMS thermal actuator is a micromechanical device that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped Single Crystal Silicon or Polysilicon as a complex compliant member, the increase in temperature can be achieved internally by electrical resistive heating or externally by a heat source capable of locally introducing heat. Types of thermal actuators
Other types of MEMS Actuators
Categories: Materials science | Nanoelectronics |
| This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "MEMS_thermal_actuator". A list of authors is available in Wikipedia. |
Last viewed
- Thermal_blooming
- Pitt-led researchers create nanoparticle coating to prevent freezing rain buildup - Inspired by water-resistant lotus leaves, the Pitt-developed solution repels freezing rain and provides the first evidence of anti-icing ability in superhydrophobic coatings
- Plasticisers impair normal brain function in vertebrates - "This is a factor that must be taken into account in future risk assessments of these substances"
- Haplogroup_A_(Y-DNA)
