EMS CATALOG NO: 72588
EMS PRODUCT: Quick Bond
DATE: 01/1/2009
PAGE NUMBER: One of 7
MATERIAL SAFETY DATA SHEET
The information contained herein is based on data considered
accurate. However, no warranty is expressed or implied
reg more
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Non-destructive Post-Anneal Characterization of
Source/Drain Processes using the Carrier
Illumination™ Method
Peter Borden and Laurie Bechtler
Boxer Cross Inc, 978 Hamilton Court, Menlo Park, CA
94025
The Carrier Illumination™ (CI) [1] method was
developed to provide a rapid, non-destructive, small more