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IUPAC name 1,1,1,5,5,5-Hexafluoro-2,4-pentanedione
Other names Hexafluoroacetylacetone, HfacH
CAS number 1522-22-1
PubChem 24874462
Molecular formula C5H2F6O2
Molar mass 208.06 g/mol
Appearance colourless liquid
Density 1.47 g/mL
Boiling point

70-71 °C

Solubility in water organic solvents
Main hazards toxic
Except where noted otherwise, data are given for
materials in their standard state
(at 25 °C, 100 kPa)

Infobox disclaimer and references

Hexafluoroacetylacetone is the chemical compound with the formula CF3C(O)CH2C(O)CF3. This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.

This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone.[1] It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.[2]


  1. ^ Henne, Albert L.; Newman, Melvin S.; Quill, Laurence L.; Staniforth, Robert A. (1947). "Alkaline condensation of fluorinated esters with esters and ketones". Journal of the American Chemical Society 69: 1819-20.
  2. ^ Mark J. Hampden-Smith, Toivo T. Kodas (1995). "Chemical vapour deposition of copper from (hfac)CuL compounds". Polyhedron 14: 699-732. doi:10.1016/0277-5387(94)00401-Y.
This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Hexafluoroacetylacetone". A list of authors is available in Wikipedia.
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