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Hexafluoroacetylacetone is the chemical compound with the formula CF3C(O)CH2C(O)CF3. This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.
Additional recommended knowledge
This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone. It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.
|This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Hexafluoroacetylacetone". A list of authors is available in Wikipedia.|