Hexafluoroacetylacetone

Hexafluoroacetylacetone

IUPAC name	1,1,1,5,5,5-Hexafluoro-2,4-pentanedione
Other names	Hexafluoroacetylacetone, HfacH
Identifiers
CAS number	1522-22-1
PubChem	24874462
Properties
Molecular formula	C₅H₂F₆O₂
Molar mass	208.06 g/mol
Appearance	colourless liquid
Density	1.47 g/mL
Boiling point	70-71 °C
Solubility in water	organic solvents
Hazards
Main hazards	toxic
Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references

Hexafluoroacetylacetone is the chemical compound with the formula CF₃C(O)CH₂C(O)CF₃. This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac^-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.

Product highlight

This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone.^[1] It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.^[2]

References

^ Henne, Albert L.; Newman, Melvin S.; Quill, Laurence L.; Staniforth, Robert A. (1947). "Alkaline condensation of fluorinated esters with esters and ketones". Journal of the American Chemical Society 69: 1819-20.
^ Mark J. Hampden-Smith, Toivo T. Kodas (1995). "Chemical vapour deposition of copper from (hfac)CuL compounds". Polyhedron 14: 699-732. doi:10.1016/0277-5387(94)00401-Y.