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Microwave plasma

Microwaves, being high frequency electromagnetic radiation in the GHz range, are capable of exciting electrodeless gas discharges.

Microwave-excited plasmas have two appealing properties:

  • Both in surface-wave and resonator mode, they can exhibit a high degree of spatial localisation. This allows to spatially separate the location of plasma generation from the location of surface processing, see afterglow plasma. Such a separation, together with an appropriate gas-flow scheme, may help reduce the negative effect that particles released from a processed substrate may have on the plasma chemistry of the gas phase.

See also

This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Microwave_plasma". A list of authors is available in Wikipedia.
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