Agilent Technologies provides new method for determining trace metal impurities in semiconductor grade phosphoric acid

04-Jun-2003

Agilent Technologies Inc. today announced a new method to determine trace metal impurities in phosphoric acid. The new method uses the high detection capability of the Agilent 7500cs reaction cell ICP-MS to determine parts-per-trillion level impurities in phosphoric acid for all of the important SEMI (Semiconductor Equipment and Materials International) specified elements. The new application presents the user with detection limits, BECs, spike recovery and stability data highlighting the suitability and accuracy of the new 7500cs.

Contamination control in semiconductor processing is increasingly important as critical dimensions (CD) of devices continue to shrink. Particulate contamination, which can lead to device defectivity, must be minimized at each of the integrated circuit (IC) manufacturing stages. Because more than 50 percent of the yield losses in IC manufacturing are due to micro contamination, it is critical that the wafer surface is not contaminated by metallic impurities present in the acid. In order to minimize this risk, many incoming chemicals including phosphoric acid are analyzed for chemical purity.

The Agilent 7500cs ICP-MS provides the testing of difficult matrices like phosphoric acid, enabling high performance, reliability and sensitivity in trace metal analysis. Designed for semiconductor and research facilities that demand the widest elemental coverage and ultimate detection power in high purity matrices, the new 7500cs features an octopole reaction system (ORS) and ShieldTorch for interference removal in a full range of semiconductor matrices.

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Investigation with spectroscopy gives us unique insights into the composition and structure of materials. From UV-Vis spectroscopy to infrared and Raman spectroscopy to fluorescence and atomic absorption spectroscopy, spectroscopy offers us a wide range of analytical techniques to precisely characterize substances. Immerse yourself in the fascinating world of spectroscopy!

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