LG-Philips Selects BOC Edwards for Fluorine Gas Supply

02-Mar-2004

BOC Edwards announced it will supply fluorine gas to LG.Philips' 6th Generation TFT-LCD (thin film transistor-liquid crystal display) manufacturing facility in Gumi, South Korea.

The fab-wide installation at LG.Philips is the first of its kind in the world and uses BOC Edwards fluorine generation technology. Fluorine gas supplied in this way offers a substantial reduction in the cost of supply compared with other perfluorocarbons, such as nitrogen trifluoride, for cleaning CVD (chemical vapor deposition) chambers used in the manufacture of TFT-LCD flat panel screens. Furthermore, fluorine has a zero global warming effect and does not directly contribute to PFC emissions.

"We are very pleased that LG.Philips has selected BOC Edwards to supply fluorine gas at its new facility" commented Noel Leeson, vice president of electronic materials for BOC Edwards. "This effort demonstrates our ability to supply fluorine safely and reliably to the LCD industry".

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