LG-Philips Selects BOC Edwards for Fluorine Gas Supply
The fab-wide installation at LG.Philips is the first of its kind in the world and uses BOC Edwards fluorine generation technology. Fluorine gas supplied in this way offers a substantial reduction in the cost of supply compared with other perfluorocarbons, such as nitrogen trifluoride, for cleaning CVD (chemical vapor deposition) chambers used in the manufacture of TFT-LCD flat panel screens. Furthermore, fluorine has a zero global warming effect and does not directly contribute to PFC emissions.
"We are very pleased that LG.Philips has selected BOC Edwards to supply fluorine gas at its new facility" commented Noel Leeson, vice president of electronic materials for BOC Edwards. "This effort demonstrates our ability to supply fluorine safely and reliably to the LCD industry".
Most read news
Topics
Organizations
Other news from the department business & finance
Get the chemical industry in your inbox
From now on, don't miss a thing: Our newsletter for the chemical industry, analytics, lab technology and process engineering brings you up to date every Tuesday and Thursday. The latest industry news, product highlights and innovations - compact and easy to understand in your inbox. Researched by us so you don't have to.