SLA Series Mass Flow Controllers

The SLA Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology.

Brooks Instrument pioneered smarter mass flow controllers with embedded self-test routines, alarms and diagnostics functionalities. They ensure that the device is always operating within user specified limits for high process yield and uptime. The SLA series has been proven to maximize production uptime and reduce maintenance and machine downtime costs.