MKS Instruments


About MKS Instruments

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers.

Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration control, optics and laser-based manufacturing solutions.

We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include the semiconductor, industrial technologies, life and health sciences, research and defense.

Facts about MKS Instruments
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Products from MKS Instruments

Product portfolio

automation systems
cold traps
differential pressure gauges
flow meter
FTIR spectrometers
FTIR spectrophotometers
gate valves
heating systems
mass flow controllers
microwave accessories
Microwave Generators
microwave plasma sources
online mass spectrometers
ozone generators
plasma sources
precision pressure gauges
pressure controllers
pressure transducers
Residual gas analyzers
vacuum controllers
vacuum pumping units
vacuum sensors
vacuum valves

Here you will find MKS Instruments Deutschland GmbH