Electronic Chemicals Division of Ashland Specialty Chemical Acquires Single-Wafer SEZ Tool
Ashland will use this R&D version of the SEZ single-wafer tool to enhance its product and process development initiatives for copper and low-k dielectric films used in dual Damascene processing. Ashland's Electronic Chemicals Division is a technology leader, meeting the increasing demands of customers for cost-effective process integration as device materials continue to rapidly evolve and change.
"With our recent acquisition of a Hitachi Focused Ion Beam (FIB) System and this additional equipment from SEZ, Ashland continues to demonstrate our commitment to making the investments needed to support our customers' processes," said Sue Zachmann, business manager of Ashland-ACT, a business unit of Ashland Specialty Chemical Company's Electronic Chemicals Division.
Ashland Specialty Chemical Company's Electronic Chemicals Division is a leading global supplier of ultrapure chemicals, photoresist strippers, on-site chemical management and parts cleaning services to the microelectronics industry. It operates production facilities in Dallas, Texas (ISO 9002-certified); Easton, Pa. (ISO 9001-certified); Milan, Italy (certified to ISO 9002 and ISO 14001); Pueblo, Co. (ISO 9002-certified) and Pyongtaek City, Korea (ISO 9002-certified). It also participates in a joint venture, Ashland Union Electronic Chemical Corp. (AUECC), serving Taiwan and the Asian region.
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