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Scanning probe lithography

Scanning probe lithography describe a set of lithographic methods in which a microscopic stylus is mechanically moved across a surface to form a pattern, either by mechanically deforming a soft film on the surface designed for this purpose (nanoimprint lithography), or by transferring a chemical species to the surface (Dip Pen Nanolithography).

This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Scanning_probe_lithography". A list of authors is available in Wikipedia.
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