Air Liquide Announces SARIS(TM), a New Balazs(TM) Analytical Service for Solid Materials Characterization
SARIS(TM), which stands for Solid Analysis by Rapid Ionization mass Spectrometry, is a complete sampling and analytical technique. Small quantities of solid material are removed, ionized and measured for elemental concentration by Inductively Coupled Plasma Mass Spectrometry (ICP-MS). SARIS(TM) can be applied to a wide range of materials such as solids, particles, films, refractory crystals, bulk materials, polymers and patterned wafers. More than 30 applications for semiconductor materials have been developed to date, including copper and new low-k dielectrics.
Results obtained using SARIS(TM) identify major constituents and trace- level concentrations in solid materials. Unlike existing techniques, SARIS(TM) minimizes interferences between impurities, thereby improving their identification. Sampling is done at atmospheric pressure in order to reduce the risk of losing critical impurities, which may happen in other analytical processes typically using a vacuum method.
SARIS(TM) results complement information obtained using existing analytical techniques, such as SEM-EDX (Scanning Electron Microscope-Energy Dispersive X-Ray), and are often superior to other traditional methods in terms of detection limits, quantitative information and cost.
Most read news
Other news from the department research and development
Get the chemical industry in your inbox
From now on, don't miss a thing: Our newsletter for the chemical industry, analytics, lab technology and process engineering brings you up to date every Tuesday and Thursday. The latest industry news, product highlights and innovations - compact and easy to understand in your inbox. Researched by us so you don't have to.
Most read news
More news from our other portals
See the theme worlds for related content
Topic World Spectroscopy
Investigation with spectroscopy gives us unique insights into the composition and structure of materials. From UV-Vis spectroscopy to infrared and Raman spectroscopy to fluorescence and atomic absorption spectroscopy, spectroscopy offers us a wide range of analytical techniques to precisely characterize substances. Immerse yourself in the fascinating world of spectroscopy!
Topic World Spectroscopy
Investigation with spectroscopy gives us unique insights into the composition and structure of materials. From UV-Vis spectroscopy to infrared and Raman spectroscopy to fluorescence and atomic absorption spectroscopy, spectroscopy offers us a wide range of analytical techniques to precisely characterize substances. Immerse yourself in the fascinating world of spectroscopy!
Topic World Mass Spectrometry
Mass spectrometry enables us to detect and identify molecules and reveal their structure. Whether in chemistry, biochemistry or forensics - mass spectrometry opens up unexpected insights into the composition of our world. Immerse yourself in the fascinating world of mass spectrometry!
Topic World Mass Spectrometry
Mass spectrometry enables us to detect and identify molecules and reveal their structure. Whether in chemistry, biochemistry or forensics - mass spectrometry opens up unexpected insights into the composition of our world. Immerse yourself in the fascinating world of mass spectrometry!