BOC Edwards Opens New Vacuum Pump Test Lab

23-Jan-2004
BOC Edwards announced the opening of a new vacuum equipment laboratory at its Clevedon, North Somerset (UK) site. vacuum technologists at BOC Edwards can now test new pump designs under realistic semiconductor process conditions, taking advantage of the unique breadth of technologies within the company, from delivery of electronic gases/order_t/'>gases to exhaust management. In addition, emerging process applications can be simulated, addressing future requirements of the semiconductor industry in the design of new vacuum pumps. "By combining several of our research efforts under one roof, we maintain a unique edge in providing our customers with truly integrated process support solutions," said Dr. Raj Rajagopal. "We are committed to providing resources to develop solutions that will improve compatibility between gas, vacuum and abatement technologies."

Other news from the department science

Most read news

More news from our other portals

Discover the latest developments in battery technology!