05-Feb-2010 - Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Accredited Analysis Laboratory for Micro and Nanotechnology at Fraunhofer IISB

The Analysis Laboratory for Micro- and Nanotechnology at the Fraunhofer In-stitute for Integrated Systems and Device Technology IISB in Erlangen was accredited by the ‘Deutsche Gesellschaft für Akkreditierung’ following DIN EN ISO/IEC 17025:2005. The testing laboratory in Erlangen carries out tests in the fields of physical, physico-chemical, and chemical analysis of substrates, media, and materials for micro and nanotechnology. The accreditation of the testing laboratory demonstrates the expertise and cutting edge of Fraunhofer IISB in the area of trace and material analysis for micro and nanoelectronics.

IISB characterizes semiconductor processes and investigates samples of semiconductor wafers, ultra clean chemicals, consumables, and construction materials. They are used in key industries, as, for example, the chip industry, micro systems technol-ogy or photovoltaics. Furthermore, manufacturers and suppliers for high-tech manufacturing equipment and metrology-based monitoring systems are supported. A further area of expertise is the control of environmental conditions and contaminations in ultra clean rooms and so-called minienvironments. This is also especially beneficial for small and medium enterprises, which neither can afford nor want to operate an own laboratory infrastructure.

The accreditation is an internationally accepted proof of competence concerning the methodology of testing, instrumentation, and infrastructure. In addition, the impartiality is guaranteed. Beside the calibration of metrology and the validation of analytical techniques, the accreditation is a certificate of confidentiality regarding the handling of test results. Also the reliability of the document management is certified.

Accreditation according to ISO 17025 is a step beyond certification according to ISO 9001. It is an additional proof of technical competence. The accreditation guarantees the traceability of analysis results to SI units as well as a well-known measurement uncertainty, assuring the comparability of analysis results between different laborato-ries. The operation of a testing laboratory according to the guidelines of ISO 17025 also guarantees the continuous development and improvement of analytical methods.

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